Semiconductor apparatus having a large-size bus connection

ABSTRACT

In a semiconductor apparatus of the present invention, a plurality of circuit components are provided. A first bus interconnects the circuit components. A second bus interconnects the circuit components. A switching unit outputs a select signal that causes each circuit component to select one of the first bus and the second bus when transmitting a signal from one of the circuit components to another. The second bus has a size larger than a size of the first bus.

CROSS-REFERENCE TO RELATED APPLICATION

This is a divisional application which claims the benefit of U.S. patentapplication Ser. No. 11/143,649, filed Jun. 3, 2005, now U.S Pat. No.7,317,241 which in turn is a Divisional application of Parentapplication Ser. No. 10/766,890, filed Jan. 30, 2004 now U.S. Pat. No.6,936,874 B2, which in turn is a Divisional application of Parentapplication Ser. No. 09/956,973, filed Sep. 21, 2001, now U.S. Pat. No.6,727,533 B2 the entire specification claims and drawings of which areincorporated herewith by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention generally relates to a semiconductor apparatus,and more particularly to a semiconductor apparatus having a large-sizebus connection (super connection) which attention is currently focusedon.

2. Description of the Related Art

A large-size bus connection (supper connection) is a wiring technologythat employs a large-size bus wiring layer having a comparatively largewidth in a range of 5 ▪ ▪ ▪ to 10 ▪ ▪. The large-size bus connection isexpected to make it possible to provide a high-speed operation ofsemiconductor apparatus with low power consumption.

The large-size bus connection has the following advantages over anormal-size bus connection that is formed in a conventionalsemiconductor apparatus through micromachining:

1) it provides a small electrical resistance because the width of thewiring layer is large,

2) it provides a small parasitic capacity because the inter-layerdistance between the bulk and the insulating layer and the wiringintervals of the large-size bus connection are large, and

3) it is suited for a high-speed operation of semiconductor devicesbecause the time constant of the large-size bus is very small.

The packaging areas of semiconductor devices have been reduced on ayearly basis, and high-density implementation methods, such as ball-gridarray (BGA), have been developed. When the BGA method is used, the bumpsare arrayed on the surface of a semiconductor chip. The re-wiring methodis provided to connect the bumps with the integrated circuit of thesemiconductor chip. The re-wiring method employs a wiring layerincluding a pattern of wiring on the resin layer, such as polyimideresin, which is provided on the chip surface. The wiring layer, used inthe re-wiring method, has a relatively large width, and it may beconsidered the large-size bus connection.

Further, a multi-chip semiconductor apparatus in which a logic deviceand a memory device coexist is known. For example, in the multi-chipsemiconductor apparatus, the memory chip is overlaid onto the logicchip, and the connection of the memory device and the logic device isestablished by using the large-size bus wiring layer in the rewiringmethod, such as the bumps or the like. The large-size bus connection isprovided to connect together the I/O (input/output) devices of the twochips.

Each of the logic chip and the memory chip includes a plurality ofblocks, and each block contains the internal circuits. The internalcircuits of the blocks and the I/O device are interconnected by aninternal bus of each of the logic chip and the memory chip. For thepurpose of connection of various circuits, the internal bus of each chipin the multi-chip semiconductor apparatus has a relatively large lengthof the wiring. In a conventional multi-chip semiconductor apparatus, theinternal buses of the chips are a normal-size bus that is formed byusing a micromachining process, although the length of the wiring isincreasing as the degree of integration grows. The parasitic capacity ofthe internal buses in the conventional multi-chip semiconductorapparatus is increased due to the use of the normal-size bus connection,which will lower the operating speed of the apparatus and increase thepower consumption of the apparatus. Hence, it is difficult for theconventional multi-chip semiconductor apparatus to provide a high-speedoperation with low power consumption if the degree of integration of thecircuits in the chip grows.

SUMMARY OF THE INVENTION

An object of the present invention is to provide a semiconductorapparatus that operates at a high speed with low power consumption byusing the large-size bus connection as the signal transmission linebetween the circuit components of the chip.

Another object of the present invention is to provide a semiconductorapparatus that has a large-size bus wiring structure configured to suitto both the wafer test conducted before formation of the large-size busconnection and the chip test or operating test conducted after theformation of the large-size bus connection.

Another object of the present invention is to provide a multi-chipsemiconductor apparatus that operates at a high speed with low powerconsumption by using the large-size bus connection as the signaltransmission line between the circuit components of the chip.

Another object of the present invention is to provide a semiconductorapparatus that provides flexibility of the layout of the circuitcomponents by using the large-size bus connection.

The above-mentioned objects of the present invention are achieved by asemiconductor apparatus having circuit components, the semiconductorapparatus comprising: a first bus which interconnects the circuitcomponents; a second bus which interconnects the circuit components; anda switching unit which outputs a select signal that causes each circuitcomponent to select one of the first bus and the second bus whentransmitting a signal from one of the circuit components to another, thesecond bus having a size larger than a size of the first bus.

The above-mentioned objects of the present invention are achieved by asemiconductor apparatus having circuit components, the semiconductorapparatus comprising: a first bus which interconnects the circuitcomponents; a second bus which interconnects the circuit components; anda switching unit which outputs a select signal that causes each circuitcomponent to select one of the first bus and the second bus whentransmitting a signal from one of the circuit components to another, theswitching unit being configured such that the first bus is selected onlywhen a wafer test is conducted before formation of the second bus, andthe second bus is selected at any time the semiconductor apparatusoperates after the wafer test is conducted.

The above-mentioned objects of the present invention are achieved by amulti-chip semiconductor apparatus in which a first chip and a secondchip coexist and each of the first and second chips includes circuitcomponents, one of the first and second chips comprising: a first wiringlayer which is provided on a semiconductor substrate; a second wiringlayer which is provided on an insulating layer covering the first wiringlayer, the second wiring layer including conductive lines eachinterconnecting the circuit components of said one of the first andsecond chips; a plurality of first electrodes which are provided in thefirst wiring layer; and a second electrode which is provided on each ofthe conductive lines, each conductive line being configured tointerconnect the plurality of first electrodes and the second electrode.

The above-mentioned objects of the present invention are achieved by asemiconductor apparatus comprising: an external terminal; a firstinternal circuit connected to the external terminal via a first contact;a second internal circuit connected to the external terminal via asecond contact; and a large-size bus connecting the external terminal toeach of the first internal circuit and the second internal circuit,wherein the large-size bus is provided in a second wiring layer on aninsulating layer covering a first wiring layer provided on asemiconductor chip, the second wiring layer contacting both the firstand second contacts, and the external terminal being brought intocontact with the second wiring layer, wherein the connection of thelarge-size bus enables the first internal circuit and the secondinternal circuit to be spaced apart each other.

In the semiconductor apparatus of one preferred embodiment of theinvention, the large-size bus that has a size larger than a size of thenormal-size bus is provided to interconnect the circuit components ofthe chip. The large-size bus connection to constitute the large-size bushas a small parasitic capacity and enables the operation at a lowdriving voltage, and it is possible to provide a high-speed operation ofthe semiconductor apparatus with low power consumption.

The multi-chip semiconductor apparatus of one preferred embodiment ofthe invention does not require the I/O devices that are needed toconnect together the multiple chips as in the conventional multi-chipsemiconductor apparatus. According to the multi-chip semiconductorapparatus of the present invention, the delay time is shortened and thepower consumption is reduced.

Further, in the semiconductor apparatus of one preferred embodiment theinvention, the large-size bus interconnects the circuit components viathe external electrodes. The semiconductor apparatus of the presentinvention is effective in providing flexibility of the layout of thecircuit components while providing high-speed operation with low powerconsumption.

BRIEF DESCRIPTION OF THE DRAWINGS

Other objects, features and advantages of the present invention willbecome apparent from the following detailed description when read inconjunction with the accompanying drawings.

FIG. 1 is a block diagram of a logic chip.

FIG. 2 is a block diagram of a first preferred embodiment of thesemiconductor apparatus of the invention.

FIG. 3 is a cross-sectional view of the semiconductor apparatus of FIG.2.

FIG. 4 is a diagram for explaining a large-size bus signal line and anormal-size bus signal line through which an address signal and acontrol signal are transmitted in the semiconductor apparatus of FIG. 2.

FIG. 5 is a diagram for explaining a large-size bus signal line and anormal-size bus signal line through which a clock signal is transmittedin the semiconductor apparatus of FIG. 2.

FIG. 6 is a diagram for explaining a large-size bus signal line and anormal-size bus signal line through which a data signal is transmittedin the semiconductor apparatus of FIG. 2.

FIG. 7A, FIG. 7B, FIG. 7C and FIG. 7D are diagrams of variations of theswitching units for use in the semiconductor apparatus of the presentembodiment.

FIG. 8 is a block diagram of a second preferred embodiment of thesemiconductor apparatus of the invention.

FIG. 9 is a block diagram of a third preferred embodiment of thesemiconductor apparatus of the invention.

FIG. 10 is a block diagram of a variation of the semiconductor apparatusof FIG. 2 in which clock signal line portions have a substantially equallength.

FIG. 11 is a block diagram of a variation of the semiconductor apparatusof FIG. 8 in which clock signal line portions have a substantially equallength.

FIG. 12 is a diagram for explaining a multi-chip semiconductor apparatusof the invention.

FIG. 13 is a diagram of a first preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

FIG. 14 is a cross-sectional view of the portion of a memory chip in themulti-chip semiconductor apparatus, which portion of the memory chip isindicated by “I” in FIG. 13.

FIG. 15 is a cross-sectional view of the portion of a logic chip in themulti-chip semiconductor apparatus, which portion of the logic chip isindicated by “II” in FIG. 13.

FIG. 16 is a diagram of a second preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

FIG. 17 is a diagram of a third preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

FIG. 18 is a diagram of a fourth preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

FIG. 19 is a diagram of a fifth preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

FIG. 20 is a diagram of a variation of the multi-chip semiconductorapparatus shown in FIG. 19.

FIG. 21 is a diagram of a sixth preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

FIG. 22 is a diagram of a seventh preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

FIG. 23 is a diagram of an eighth preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

FIG. 24 is a cross-sectional view of the multi-chip semiconductorapparatus shown in FIG. 23.

FIG. 25 is a diagram of a ninth preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

FIG. 26 is a diagram for explaining a configuration of an LSI system.

FIG. 27 is a diagram of a tenth preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

FIG. 28 is a diagram of an eleventh preferred embodiment of themulti-chip semiconductor apparatus of the invention.

FIG. 29 is a diagram of a twelfth preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

FIG. 30 is a perspective view of the multi-chip semiconductor apparatusshown in FIG. 29.

FIG. 31 is a diagram of a thirteenth preferred embodiment of themulti-chip semiconductor apparatus of the invention.

FIG. 32 is a diagram of a fourteenth preferred embodiment of themulti-chip semiconductor apparatus of the invention.

FIG. 33 is a perspective view of the multi-chip semiconductor apparatusshown in FIG. 32.

FIG. 34A and FIG. 34B are diagrams showing a fifteenth preferredembodiment of the multi-chip semiconductor apparatus of the invention.

FIG. 35 is a diagram for explaining another configuration of the LSIsystem.

FIG. 36 is a diagram of a sixteenth preferred embodiment of themulti-chip semiconductor apparatus of the invention.

FIG. 37 is a diagram for explaining another configuration of themulti-chip semiconductor apparatus that is different from the multi-chipsemiconductor apparatus of FIG. 12.

FIG. 38 is a block diagram of another preferred embodiment of thesemiconductor apparatus of the invention.

FIG. 39 is a cross-sectional view of the semiconductor apparatus shownin FIG. 38.

FIG. 40 is a block diagram of a variation of the semiconductor apparatusof the present embodiment.

FIG. 41 is a block diagram of another variation of the semiconductorapparatus of the present embodiment.

FIG. 42 is a diagram showing a configuration of the semiconductorapparatus of the present embodiment.

FIG. 43 is a block diagram of a semiconductor memory apparatus.

FIG. 44A and FIG. 44B are diagrams showing another preferred embodimentof the semiconductor apparatus of the invention.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

Before the preferred embodiments of the present invention are explained,a description will be given of a logic chip to which the presentinvention is applied, with reference to FIG. 1.

FIG. 1 shows a configuration of a logic chip. As shown in FIG. 1, thelogic chip 110 generally includes a plurality of function blocks 111through 115, an I/O (input/output) device 116, and a clock buffer 117.Each of the function blocks 111 through 115 includes internal circuits.The I/O device 116 provides interface for the logic chip 110 with anexternal device. The clock buffer 117 retains an externally suppliedclock signal and delivers the clock signal to the internal circuits. Abus 118 and a clock signal line 119 are provided to interconnect thefunction blocks 111 through 115, the I/O device 116 and the clock buffer117 and to transmit a signal between the respective elements of thelogic chip 110. The bus 118 serves to deliver a data signal, an addresssignal and a control signal between the respective elements of the logicchip 110. The clock signal line 119 serves to deliver the clock signal,output by the clock buffer 117, to the respective elements of the logicchip 110.

In a conventional semiconductor apparatus, the bus 118 and the clocksignal line 119 are signal lines that are formed through micromachining.Among the signal lines of the logic chip 110, the bus 118 and the clocksignal line 119 are relatively long signal lines. In one preferredembodiment of the semiconductor apparatus of the present invention, thelarge-size bus connection is applied to these relatively long signallines.

Next, a description will be given of the preferred embodiments of thepresent invention.

FIG. 2 shows a first preferred embodiment of the semiconductor apparatusof the invention.

As shown in FIG. 2, the semiconductor apparatus 100 of the presentembodiment is a logic chip (or a logic device) that is similar to thelogic chip 110 of FIG. 1. The semiconductor apparatus 100 generallyincludes a plurality of function blocks 121 through 125, an I/O device126, and a clock buffer 127. Each of the function blocks 121 through 125includes internal circuits. The I/O device 126 provides interface forthe semiconductor apparatus 100 with an external device. The clockbuffer 127 retains an externally supplied clock signal and delivers theclock signal to the internal circuits. A bus 128 and a clock signal line129, which are indicated by the dotted lines in FIG. 2, are provided tointerconnect the function blocks 121 through 125, the I/O device 126 andthe clock buffer 127 and to transmit a signal between the respectiveelements of the semiconductor apparatus 100.

In the semiconductor apparatus 100 of FIG. 2, the bus 128 and the clocksignal line 129 are essentially the same as the corresponding elements118 and 119 of the logic chip 110 shown in FIG. 1. Namely, the bus 128and the clock signal line 129 are relatively long signal lines that areformed through micromachining, (which are called the normal-size busconnection). The bus 128 and the clock signal line 129 are provided tointerconnect the function blocks 121 through 125, the I/O device 126 andthe clock buffer 127 and to transmit a signal between the respectiveelements of the semiconductor apparatus 100.

Further, the semiconductor apparatus 100 (the logic chip) of FIG. 2 isprovided with a large-size bus 131, a clock signal line 132, and aswitching unit 130. The large-size bus 131 and the clock signal line 132are formed by using the large-size bus connection. In the semiconductorapparatus 100 of the present embodiment, the function blocks 121-125,the I/O device 126 and the clock buffer 127 are operated such that oneof the normal-size bus 128 and the large-size bus 131 and one of theclock signal line 129 and the clock signal line 132 are selected inresponse to a select signal S1 output by the switching unit 130. Theselected bus and the selected clock signal line are connected to each ofthe function blocks 121-125, the I/O device 126 and the clock buffer127.

FIG. 3 is a cross-sectional view of the semiconductor apparatus of FIG.2 for explaining the relationship between the normal-size bus 128 withthe clock signal line 129 and the large-size bus 131 with the clocksignal line 132.

As shown in FIG. 3, the multi-level wiring layer 142 is formed on thesemiconductor substrate 140. The multi-level wiring layer 142 includesthe wiring layer 142 a and the wiring layer 142 b. The wiring layers 142a and 142 b are isolated from each other by an insulating layer ofpolyimide resin. Further, an insulating layer of polyimide resin isprovided on the top surface of the upper wiring layer 142 b. For thesake of convenience, the insulating layers of the multi-level wiringlayer 142 are collectively designated by reference numeral 141.

In the semiconductor apparatus shown in FIG. 3, the bus 128 and theclock signal line 129 are provided in the multi-level wiring layer 142.These signal lines are the normal-size bus connection formed throughmicromachining.

Further, in the semiconductor apparatus of FIG. 3, the multi-levelwiring layer 142 includes the electrode 143 which is connected to thewiring layers 142 a and 142 b. The electrode 143 is electricallyconnected to the diffusion layer 144 via the contacts 145 and 146 andthe intermediate wiring layer. The diffusion layer 144 is formed on thesemiconductor substrate 140.

Further, in the semiconductor apparatus of FIG. 3, the large-size buswiring layer 148 is provided on the insulating layer 147. The large-sizebus 131 and the clock signal line 132 are provided in the large-size buswiring layer 148. The wiring layer 148 includes the contact 133 that iscoupled to the electrode 143. The electrode 143 is exposed to the wiringlayer 148 at the contact hole which is formed in the insulating layer141. The wiring layer 148 enters the insulating layers 141 and 147 atthe contact hole so that the contact 133 is electrically connected tothe electrode 143. The large-size bus wiring layer 148 is larger inwidth and thickness than the wiring layers 142 a and 142 b of themulti-level wiring layer 142. For example, the large-size bus wiringlayer 148 has a width in a range of 5 ▪ ▪ ▪ to 10 ▪ ▪.

In the semiconductor apparatus of FIG. 3, the cover layer 149 isprovided on the large-size bus wiring layer 148. The cover layer 149includes an opening (or a through hole) where the large-size bus wiringlayer 148 is exposed. The electrode 150 is provided at the opening ofthe cover layer 149, and the electrode 150 is used to connect thelarge-size bus 131 (or the clock signal line 132) with another chipprovided on the wiring layer 148. The electrode 150 is constructed, forexample, in the form of the bump.

In the above-described embodiment, the electrode 150 is provided whenforming a multi-chip semiconductor apparatus. The electrode 150 of thesemiconductor apparatus 100 is connected to the electrode of anotherchip. When there is no need to form the multi-chip semiconductorapparatus, the electrode 150 may be omitted from the semiconductorapparatus 100. In such embodiment, the large-size bus wiring layer 148is fully covered with the cover layer 149.

As shown in FIG. 2, in the semiconductor apparatus 100 of the presentembodiment, the respective signal lines of the large-size bus 131 andthe clock signal line 132 are connected to each of the function blocks121-125 via the contacts 133. The respective signal lines of thelarge-size bus 131 are connected to the I/O device 126 via the contacts133. Further, the clock signal line 132 is connected to the clock buffer127 via the contact 133.

FIG. 4 shows a large-size bus signal line and a normal-size bus signalline through which an address signal and a control signal aretransmitted in the semiconductor apparatus of FIG. 2.

In FIG. 4, the signal line 128 i as one of the signal lines of thenormal-size bus 128 and the signal line 131 i as one of the signal linesof the large-size bus 131 are provided to transmit the address signaland the control signal between the function blocks 121 and 125 in thesemiconductor apparatus 100.

The normal-size bus 128 and the large-size bus 131 may include thesignal lines through which the signal is transmitted in one directiononly and the signal lines through which the signal is bi-directionallytransmitted. The signal lines 128 i and 131 i, shown in FIG. 4, are thesignal lines through which the signal is transmitted in one directiononly. For example, a control signal or an address signal is transmittedthrough the signal lines in one direction only.

As shown in FIG. 4, the function block 121 includes a driver unit 151,and the driver unit 151 sends the signal SGL, supplied from the internalcircuit of the function block 121, to the selected one of the signalline 128 i and the signal line 131. A bus switching unit 130A isprovided in the switching unit 130 in FIG. 2. The switching unit 130Aoutputs a select signal S1 to the driver 151 via the control line 134,and the selected one of the signal line 128 i and the signal line 131 isdetermined according to the high/low level of the select signal S1output by the switching unit 130A.

The driver unit 151 includes an inverter 152, an inverter 153, aninverter 154, an NAND gate 155 and an NAND gate 156. When the selectsignal S1 received at the drive unit 151 is set at the high level (“H”),the NAND gate 156 is set in the active state and the NAND gate 155 isset in the inactive state. In this case, the signal SGL is delivered tothe signal line 128 i of the normal-size bus 128 through the NAND gate156 and the inverter 154. On the other hand, when the select signal S1received at the drive unit 151 is set at the low level (“L”), the NANDgate 155 is set in the active state and the NAND gate 156 is set in theinactive state. In this case, the signal SGL is delivered to the signalline 131 i of the large-size bus 131 through the NAND gate 155 and theinverter 153.

As shown in FIG. 4, the switching unit 130A includes a large-size bus161, a resistor 162 and an inverter 163. The large-size bus 161 and theresistor 162 are connected in series, and the power source voltage VCCand the ground voltage VSS are supplied to the ends of the large-sizebus 161 and the resistor 162. When the large-size bus 161 is not formedin the switching unit 130A, the input of the inverter 63 is at the levelof the ground voltage VSS. The select signal S1 output by the switchingunit 130A in this condition is set at the high level (“H”). When thelarge-size bus 161 is provided in the switching unit 130A, the input ofthe inverter 63 is at the level of the power source voltage VCC. Theselect signal S1 output by the switching unit 130A in this condition isset at the low level (“L”).

Further, as shown in FIG. 4, the function block 125 has a receiver unit157 which includes an NOR gate 158, an inverter 159 and a field-effecttransistor (FET) 160. The FET 160 is, for example, an n-channelmetal-oxide semiconductor (MOS) transistor. When the select signal S1received at the receiver unit 157 is set at the high level (“H”), thetransistor 160 is set in ON state, and the signal line 128 i of thenormal-size bus 128 is selected. On the other hand, when the selectsignal S1 is set at the low level (“L”), the transistor 160 is set inOFF state, and the signal line 131 i of the large-size bus 131 isselected.

In the receiver unit 157, the inverter 159 outputs the signal SGL,received from the selected one of the signal line 128 i and the signalline 131 i, to the internal circuit (not shown) of the function block125.

By taking the wafer test and the chip test of the semiconductorapparatus into consideration, the switching operation of the switchingunit 130A is carried out as follows.

The wafer test is conducted by using a wafer probe, in order todetermine whether the chip on the wafer after the pattern is formed onthe wafer is rejected or accepted. When the chip is determined as beingrejected, the defective portion of the chip is repaired by using aredundant means that is provided in advance. At that time, the fuse iscut off by irradiation of a laser beam. The fuse is disposed in themulti-level wiring layer 142 in FIG. 4, and it is exposed from theopening (the window for repair) which is provided in the insulatinglayer 141. The wafer test must be performed before the forming of thelarge-size bus connection is performed. If the insulating layer 47 isformed on the insulating layer 141 and the large-size bus wiring layer148 is formed thereon, the window for repair is concealed.

Before the large-size bus wiring layer 148 is formed in thesemiconductor apparatus, the signal line 131 i of the large-size bus 131shown in FIG. 4 is not yet formed. In addition, the large-size bus 161is not formed in the switching unit 130A. Hence, in such condition, theselect signal S1 is set at the high level (“H”), and the signal line 128i of the normal-size bus 128 is selected.

After the wafer test is conducted, the large-size bus wiring layer 148in FIG. 3 and the large-size bus 161 in FIG. 4 are formed in thesemiconductor apparatus. As the large-size wiring layer 148 becomes thefinal wiring of the semiconductor apparatus, the chip test must beconducted after the large-size bus wiring layer 148 is formed. At thattime, the signal line 128 i of the normal-size bus 128 is no longerneeded. If the signal line 128 i connected to the circuit components ofthe semiconductor apparatus is left unchanged, the parasitic capacitythereof is attached to the signal line 131 i of the large-size bus 131,which may increase the power consumption of the semiconductor apparatus.

As described above, after the wafer test is conducted, the large-sizebus 161 is formed in the switching unit 130A in FIG. 4. When the chiptest is conducted, the select signal S1, output by the switching unit130A, is set at the low level (“L”). The signal line 131 i of thelarge-size bus 131 is selected. As the large-size bus 161 is permanentlyprovided in the switching unit 130A, the signal line 131 i is alwaysselected. The large-size bus connection has the above-describedadvantages over the normal-size bus connection, and, therefore, thesemiconductor apparatus 100 of the present embodiment (FIG. 2) iseffective in providing high-speed operation with low power consumption.The delay time as in the conventional semiconductor apparatus isshortened because of the use of the large-size bus connection.

FIG. 5 shows a large-size bus clock signal line and a normal-size busclock signal line through which a clock signal is transmitted in thesemiconductor apparatus of FIG. 2.

As shown in FIG. 5, the large-size bus clock signal line 132 and thenormal-size bus clock signal line 129 are provided between the clockbuffer 127 and one of the function blocks 121-125 in the semiconductorapparatus 100. The clock signal is delivered on a selected one of theclock signal lines 128 and 132 from the clock buffer 127 to each of thefunction blocks 121-125 in one direction only.

The clock buffer 127 includes a clock input unit 165 and a driver unit166. The clock input unit 165 is connected to an external clock terminal164. The driver unit 166 includes an inverter 167, an inverter 168, aninverter 169, an NAND gate 170, and an NAND gate 171. Each of thefunction blocks 121 to 125 includes a receiver unit 172, and thereceiver unit 172 includes an NOR gate 173, an inverter 174, and ann-channel transistor 175.

A clock signal line switching unit 130B is provided in the switchingunit 130 in FIG. 2. The switching unit 130B has the configuration thatis the same as the configuration of the switching unit 130A in FIG. 4.Namely, as shown in FIG. 5, the switching unit 130B includes alarge-size bus 161 a, a resistor 162 a and an inverter 163 a. In theembodiments of FIG. 4 and FIG. 5, the bus switching unit 130A and theclock signal switching unit 130B are provided separately, and thecontrol signal line 134 and the control signal line 134A are connectedseparately. Alternatively, one of the switching units 130A and 130B aswell as one of the control signal lines 134 and 134A may be provided forboth the purposes of the bus switching and the clock signal lineswitching.

Similar to the previous embodiment of FIG. 4, in the embodiment of FIG.5, the driver unit 166 and the receiver unit 172 select the normal-sizebus clock signal line 129 when the select signal S1 output by theswitching unit 130B is set at the high level (“H”). On the other hand,when the select signal S1 is set at the low level (“L”), the driver unit166 and the receiver unit 172 select the large-size bus clock signalline 132.

FIG. 6 is a diagram for explaining a large-size bus signal line and anormal-size bus signal line through which a data signal is transmittedin the semiconductor apparatus of FIG. 2.

In FIG. 6, the data signal line 128 j as one of the signal lines of thenormal-size bus 128 and the data signal line 131 j as one of the signallines of the large-size bus 131 are provided to transmit the data signalDATA between the function blocks 121 and 125 in the semiconductorapparatus 100.

The data signal DATA is bi-directionally transmitted on one of the datasignal lines 128 j and 131 j between the respective function blocks 121to 125. In the embodiment of FIG. 6, only the function blocks 121 and125 are shown. Each of the function blocks 121 to 125 includes both thedriver unit and the receiver unit with respect to each of the datasignal lines provided in the semiconductor apparatus 100. Specifically,in the embodiment of FIG. 6, the function block 121 includes a driverunit 181 and a receiver unit 182, and the function block 125 includes adriver unit 201 and a receiver unit 202.

In the function block 121, the driver unit 181 includes an inverter 183,an inverter 184, an inverter 190, an inverter 191, an NAND gate 187, anNAND gate 199, an NOR gate 185, an NOR gate 186, an NAND gate 192, anNAND gate 193, a p-channel transistor 188, a p-channel transistor 195,an n-channel transistor 189, and an n-channel transistor 196. Thereceiver unit 182 includes an NOR gate 197, an inverter 198 and ann-channel transistor 199.

The driver unit 181 is set in the active state when the enable signalEN1, which is set at the high level (“H”), is received from the internalcircuit of the function block 121. When the select signal S1 output bythe switching unit 130A is set at the high level (“H”), the selectsignal S1 received at the NOR gate 192 is set at the low level (“L”),and the NOR gate 192 is set in the active state. In this case, theselect signal received at the NOR gate 185 is set at the high level(“H”), and the NOR gate 185 is set in the inactive state. Thetransistors 195 and 196 are driven in accordance with the value of thedata signal DATA. The driver unit 181 outputs the data signal DATA tothe data signal line 128 j of the normal-size bus 128.

When the select signal S1 output by the switching unit 130A is set atthe high level (“H”), the inverter 222 outputs the low-level selectsignal S1, the n-channel transistor 221 connected to the data signalline 128 j is set in OFF state.

When the select signal S1 output by the switching unit 130A is set atthe low level “L” at the time of receiving the high-level enable signalEN1 from the internal circuit of the function block 121, the NOR gate185 is set in the active state while the NOR gate 192 is set in theinactive state. In this case, the transistors 188 and 189 are driven inaccordance with the value of the data signal DATA. The driver unit 181outputs the data signal DATA to the data signal line 131 j of thelarge-size bus 131.

When the select signal S1 output by the switching unit 130A is set atthe low level (“L”), the inverter 222 outputs the high-level selectsignal S1. The n-channel transistor 221, connected to the data signalline 128 j, is set in ON state. The data signal line 128 j of thenormal-size bus 128 is set at the level of the ground voltage VSS.

Similar to the function block 121 described above, in the function block125, the driver unit 201 includes an inverter 203, an inverter 204, aninverter 210, an inverter 211, an NAND gate 207, an NAND gate 214, anNOR gate 205, an NOR gate 206, an NAND gate 212, an NAND gate 213, ap-channel transistor 208, a p-channel transistor 215, an n-channeltransistor 209, and an n-channel transistor 216. The receiver unit 202includes an NOR gate 217, an inverter 218 and an n-channel transistor219. The operations of the driver unit 201 and the receiver unit 202 areessentially the same as the operations of the above-described driverunit 181 and the receiver unit 182.

Further, the function blocks 122, 123 and 124, other than the functionblocks 121 and 125, are configured in the same manner.

FIG. 7A, FIG. 7B, FIG. 7C and FIG. 7D show variations of the switchingunits for use in the semiconductor apparatus of the present embodiment.The bus switching unit 130A and the clock signal line switching unit130B, which are described above with reference to FIG. 4 and FIG. 5, maybe configured as shown in FIG. 7A, FIG. 7B, FIG. 7C and FIG. 7D.

In the embodiment of FIG. 7A, the switching unit 130A or 130B includes aresistor 231, an inverter 232, and a fuse 233. The power source voltageVCC and the ground voltage VSS are supplied to the ends of the resistor231 and the fuse 233. When the fuse 233 connects the resistor 231 withthe ground voltage VSS, the select signal S1 output by the switchingunit is set at the high level (“H”). When the fuse 233 is cut off, theselect signal S1 is set at the low level (“L”).

In the embodiment of FIG. 7B, the switching unit 130A or 130B includes atesting pad 234, a pull-up resistor 235, and an inverter 236. The powersource voltage VCC is supplied to the end of the pull-up resistor 235.Before the large-size bus connection is formed, the testing pad 234 iscontacted by the test probe so as to set the testing pad 234 at thelevel of the ground voltage VSS. In this condition, the select signal S1output by the switching unit is set at the high level (“H”). When thetesting pad 234 is set in the open state, the select signal S1 is set atthe low level (“L”).

In the embodiment of FIG. 7C, the switching unit 130A or 130B includesan electrode 239, a resistor 240, and an inverter 241. The electrode 239is a terminal for external connection. For example, the electrode 239 isformed by the electrode 150 in FIG. 3. When the semiconductor apparatus100 and another chip (or board) 237 are connected together, theelectrode 239 is connected to the electrode 238 of the chip 237. Forexample, the chip 237 is overlaid onto the semiconductor apparatus 100,the electrode 238 contacts the electrode 239. The source power voltageVCC, supplied to the electrode 238 in the chip 237, is supplied to theelectrode by the connection of the electrodes 238 and 239. In thiscondition, the select signal S1, output by the inverter 241 of theswitching unit, is set at the high level (“L”). In other words, when thesemiconductor apparatus 100 is in the usable condition, the large-sizebus and the large-size bus clock signal line are selected.

In the embodiment of FIG. 7D, the switching unit 130A or 130B isconstructed by a mode selection circuit. For example, the mode selectioncircuit is provided in a DRAM chip. The mode selection circuit sets theoperating mode of the internal circuit in response to the externallysupplied command signal or address signal. By using the mode selectioncircuit, the setting of the select signal S1 at one of the high level orthe low level is established.

The switching units 130A and 130B shown in FIG. 4 through FIG. 7A arethe circuits that are configured by using a programmable device.

Next, FIG. 8 shows a second preferred embodiment of the semiconductorapparatus of the invention.

The semiconductor apparatus 100A of the present embodiment is configuredsuch that the timing of operation using the large-size bus connectionduring the chip test after the formation of the large-size busconnection matches with the timing of operation using the normal-sizebus connection during the wafer test with no considerable difference.

As shown in FIG. 8, the function blocks 121 through 125 respectivelyinclude the clock buffers 245 through 249. The clock buffer 249 has aconfiguration that is different from the configuration of other clockbuffers 245-248, which will be described later. External connection pads(electrodes) 250 through 254 are respectively connected to the clockbuffers 245 through 249. The pads 250-254 are disposed in the vicinityof the function blocks 121-125.

The large-size bus clock signal line 256 and the control line 134A areconnected to each of the clock buffers 245-248. The clock signal line256 is connected to the function blocks 121-125 via the contacts 257.Each of the clock buffers 245-248 selects one of the clock signalexternally supplied from the pads 250-253 and the clock signalexternally supplied via the large-size bus clock signal line 256, inaccordance with the level of the select signal S1 output by theswitching unit 130B. Each of the clock buffers 245-248 outputs theselected clock signal to one of the function blocks 121-124 as theinternal clock signal.

The pads 250-254 are formed in the normal-size bus wiring layer, andthey correspond to the electrode 143 shown in FIG. 3. Similar to thepads 250-254, the pad 255 receives the externally supplied clock signal,but the pad 255 is formed in the large-size bus wiring layer. The pad255 corresponds to the electrode 150 shown in FIG. 3. The electrode 150in FIG. 3 is formed as the bump, but the pad 255 in this embodiment maybe formed into a flat-surface electrode.

As shown in FIG. 8, the pads 254 and 255 are disposed in the vicinity ofthe function block 125. The externally supplied clock signal isdelivered to the function block 125 via the clock buffer 249 and theclock signal line 256A. In the present embodiment, when the wafer testis conducted before the formation of the large-size bus connection, theclock signal received at the pad 254 is sent to the function block 125,and the chip test or the operating test is conducted after the formationof the large-size bus connection, the clock signal received at the pad255 is sent to the function block 125. The clock signal line 256A inthis embodiment is adequately short, and the timing of operation of thefunction block 125 using the large-size bus connection during the chiptest or the operating test after the formation of the large-size busconnection matches with the timing of operation of the function block125 using the normal-size bus connection during the wafer test with noconsiderable difference.

During the wafer test, the external clock signals received at the pads250-253 are respectively delivered to the function blocks 121-124 viathe clock buffers 245-248 at the same timing. The select signal S1 atthis time is set at the high level (“H”). During the chip test after theformation of the large-size bus connection, the select signal S1 is setat the low level (“L”). In this case, the external clock signal receivedat the pad 255 is sent to the function blocks 121-124 via the buffer 249and the large-size bus clock signal line 256, and it is sent to thefunction block 125 via the normal-size bus clock signal line 256A. Theclock signal line 256 is formed in the large-size bus wiring layer andthe clock delay of the clock signal line 256 is negligible. The clocksignal line 256A is adequately short and the clock delay of the clocksignal line 256A is negligible.

In the semiconductor apparatus 100A of FIG. 8, the clock buffer 245includes a buffer 273, an inverter 274, an NOR gate 275, an n-channeltransistor 276, and an n-channel transistor 277. When the select signalS1 is at the high level (“H”), the transistor 277 is set in OFF state soas to disable the clock signal line 156. When the select signal S1 is atthe low level (“L”), the transistor 276 is set in OFF state so as todisable the pad 250. The other clock buffers 246-248 are configured inthe same manner as the clock buffer 245. The buffer 249 and the buffer273 are constructed by using a cascaded connection of two CMOSinverters.

Suppose that, in the semiconductor apparatus of the present embodiment,the number of the pads which are formed in the normal-size bus wiringlayer (such pads are called the first electrodes) are indicated by “M”,and the number of the pads which are formed in the large-size bus wiringlayer (such pads are called the second electrodes) is indicated by “N”.The semiconductor apparatus of the present embodiment is configured suchthat, when the external clock signal is received at each of the firstelectrodes and the second electrodes, the conditions: M>N ▪ 1 are met.In the above embodiment shown in FIG. 8, the pads 250-254 are the firstelectrodes (M=5), and the pad 255 is the second electrode (N=1).

Next, FIG. 9 shows a third preferred embodiment of the semiconductorapparatus of the invention.

The semiconductor apparatus 100B of the present embodiment provides asimplified configuration of the semiconductor apparatus 100A of theprevious embodiment of FIG. 8.

As shown in FIG. 9, the semiconductor apparatus 100B does not use theclock signal selection, which is performed by the clock buffers 245-248in the previous embodiment of FIG. 8. Instead, the semiconductorapparatus 100B of the present embodiment uses a wired OR operation of aclock signal line 256. The clock signal line 256 is formed by thelarge-size bus connection, and the clock signal line 256 is connectedwith respective pads 250 through 253. The clock signal line 256 isextended from the pad 255 that is formed in the large-size bus wiringlayer. The clock signal line 256 is connected to the pads 250 through254 via the contacts 257. In addition, the clock signal line 256 isconnected to the inputs of the buffers 245A through 249A that aredisposed adjacent to the respective function blocks 121 through 125. Theoutputs of the buffers 245A through 249A are connected to the functionblocks 121 through 125.

Similar to the buffers 249 and 273 described earlier, each of thebuffers 245A through 249A is constructed by using a plurality of CMOSinverters connected in the cascaded formation.

When the wafer test is conducted, the externally supplied clock signalis delivered to the pads 250 through 254. After the large-size busconnection is formed in the semiconductor apparatus 100B, the externallysupplied clock signal is delivered to the pad 253.

The semiconductor apparatus 100B of the present embodiment has asimplified configuration when compared with the configuration of thesemiconductor apparatus 100A of the previous embodiment. However, afterthe large-size bus connection is formed, the externally supplied clocksignal is delivered to the clock buffers 245A through 249A. The load ofthe clock signal line 256 in such a case is increased. For this reason,when it is preferred to provide a high-speed operation of thesemiconductor apparatus, the configuration of the second preferredembodiment (FIG. 8) is more effective than the configuration of thethird preferred embodiment (FIG. 9).

FIG. 10 shows a variation of the semiconductor apparatus of FIG. 2 inwhich the portions of the clock signal line have a substantially equallength.

Generally, it is desired that the clock signal line portions between thecircuit components have an equal length in order to provide highaccuracy of the timing of operation by the clock signal delivered fromthe clock buffer to each circuit component.

As shown in FIG. 10, the semiconductor apparatus 100C of the presentembodiment includes the bus 131A and the clock signal line 132A whichare both formed by using the large-size bus connection. The clock signalline 132A is divided into clock signal line portions between the circuitcomponents, and these line portions have a substantially equal length.For example, in the clock signal line 132A of the present embodiment,the clock signal line portion between the function blocks 121 and 123and the clock signal line portion between the function blocks 122 and123 have the same length. If the clock signal line portions have aslight difference in length but a high accuracy of the timing ofoperation is ensured, the length difference may be negligible.

FIG. 11 shows a variation of the semiconductor apparatus of FIG. 8 inwhich clock signal line portions have a substantially equal length.

As shown in FIG. 11, the semiconductor apparatus 100D of the presentembodiment includes the clock signal line 256A which is formed by usingthe large-size bus connection. The clock signal line 256A is dividedinto clock signal line portions between the circuit components, andthese line portions have a substantially equal length. For example, inthe clock signal line 256A of the present embodiment, the respectiveclock signal line portions between one of the function block 122 or 123and the clock buffer (CLK BUFFER 1) 249 have a substantially equallength. If the clock signal line portions have a slight difference inlength but a high accuracy of the timing of operation is ensured, thelength difference may be negligible.

In the semiconductor apparatus 100D of FIG. 11, the clock buffer 281that has the same configuration as that of the clock buffer 249 is used,in order to provide the clock signal line portions between the circuitcomponents having a substantially equal length.

In the above-described embodiments, the semiconductor apparatus of thepresent invention is applied to the logic chip. However, the presentinvention is not limited to these embodiments. For example, the presentinvention is also applicable to a memory chip or a multi-chipsemiconductor apparatus in which the function blocks and the memoriescoexist.

Next, FIG. 12 is a diagram for explaining a multi-chip semiconductorapparatus according to the present invention.

As shown in FIG. 12, the multi-chip semiconductor apparatus of thepresent invention generally includes a logic chip 10, a memory chip 20,and a large-size bus 30. The logic chip 10 includes a plurality offunction blocks each having internal circuits, and the memory chip 20includes a plurality of memory blocks each having internal circuits. Thelarge-size bus 30 is provided in the large-size bus wiring layer. Thelarge-size bus 30 serves as a conduction line that interconnects thefunction blocks of the logic chip 10 and the memory blocks of the memorychip 20. Namely, the large-size bus 30 is shared by the logic chip 10and the memory chip 20 for transmission of a signal between therespective blocks.

As described earlier, the large-size bus connection to constitute thelarge-size bus 30 has a small parasitic capacity and enables theoperation at a low driving voltage, and it is possible to provide ahigh-speed operation of the semiconductor apparatus with low powerconsumption. The multi-chip semiconductor apparatus of the presentinvention does not require the I/O devices that are needed to connectthe logic chip 10 and the memory chip 20 as in a conventional multi-chipsemiconductor apparatus. According to the multi-chip semiconductorapparatus of the present invention, the delay time is shortened and thepower consumption is reduced.

FIG. 13 shows a first preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

As shown in FIG. 13, the multi-chip semiconductor apparatus of thepresent embodiment includes a logic chip 10A and a memory chip 20A. Thelogic chip 10A is overlaid onto the memory chip 20A so that the logicchip surface and the memory chip surface confront each other.

The memory chip 20A has a size larger than a size of the logic chip 10A.The memory chip 20A includes four memory blocks 21 ₁ through 21 ₄, fourI/O devices 22 ₁ through 22 ₄, and a large-size bus 30A. The memoryblocks 21 ₁-21 ₄ and the I/O devices 22 ₁-22 ₄ are formed on thesemiconductor substrate or chip. The large-size bus 30A is formed in thelarge-size bus wiring layer. The I/O devices 22 ₁-22 ₄ and the signallines of the large-size bus 30A are respectively connected together viathe contacts 23. The memory blocks 21 ₁-21 ₄ and the I/O devices 22 ₁-22₄ are electrically connected together, respectively, and the memoryblocks 21 ₁-21 ₄ are interconnected through the large-size bus 30A.Further, the pads 24 are provided on the respective signal lines of thelarge-size bus 30A, and the electrical connection between the memorychip 20A and the logic chip 10A is established via the pads 24 on thelarge-size bus 30A.

FIG. 14 is a cross-sectional view of the portion of the memory chip 20Ain the multi-chip semiconductor apparatus, which portion is indicated by“I” in FIG. 13.

As shown in FIG. 14, the multi-level wiring layer 35 is formed on thesemiconductor substrate 33 (the memory chip surface). The multi-levelwiring layer 35 includes the wiring layer 35 a and the wiring layer 35b. The wiring layers 35 a and 35 b are isolated from each other by aninsulating layer of polyimide resin. Further, an insulating layer ofpolyimide resin is provided on the top surface of the upper wiring layer35 b. For the sake of convenience, the insulating layers of themulti-level wiring layer 35 are collectively designated by referencenumeral 34.

In the memory chip of FIG. 14, the multi-level wiring layer 35 includesthe electrode 36 (which is called the first electrode) which isconnected to the wiring layers 35 a and 35 b. The electrode 36 iselectrically connected to the diffusion layer 33 a via the contacts 41 aand 41 b and the intermediate wiring layer. The diffusion layer 33 a isformed on the semiconductor substrate 33.

Further, in the memory chip of FIG. 14, the insulating layer 37 isformed on the insulating layer 34, and the large-size bus wiring layer38 is provided on the insulating layer 37. The wiring layer 38constitutes one of the signal lines of the large-size bus 30A in FIG.13. The wiring layer 38 includes the contact 23 that is coupled to theelectrode 36. The electrode 36 is exposed to the wiring layer 38 at thecontact hole which is formed in the insulating layer 34. The wiringlayer 38 enters the insulating layers 34 and 37 at the contact hole sothat the contact 23 is electrically connected to the electrode 36. Thelarge-size bus wiring layer 38 is larger in width and thickness than thewiring layers 35 a and 35 b of the multi-level wiring layer 35. Forexample, the large-size bus wiring layer 38 has a width in a range of 5▪ ▪ ▪ to 10 ▪ ▪.

In the memory chip of FIG. 14, the cover layer 39 is formed on thelarge-size bus wiring layer 38. The cover layer 39 has an opening (or athrough hole) in which the large-size bus wiring layer 38 is exposed.The electrode 42 (the second electrode), which is not shown in FIG. 14,is provided at the opening of the cover layer 39, and the electrode 42is used to connect the memory chip 20A with another chip (the logic chip10A). In the present embodiment, the electrode 42 corresponds to the pad24 in FIG. 13.

Referring back to FIG. 13, in the multi-chip semiconductor apparatus ofthe present embodiment, the logic chip 10A includes three functionblocks 27 ₁ through 27 ₃. The contacts 28 and the bumps 29 are formed oneach of the function blocks 27 ₁-27 ₃. The function blocks 27 ₁-27 ₃ areformed on the semiconductor chip. The contacts 28 are connected to thecorresponding one of the function blocks 27 ₁-27 ₃. The bumps 29 whichare formed into the projecting electrodes are connected to the pads 24of the large-size bus 30A of the memory chip 20A. is formed in thelarge-size bus wiring layer. The bumps 29 are disposed on each functionblock of the logic chip 10A at the locations that match with thelocations of the pads 24 on the memory chip 20A when the logic chip 10Ais overlaid onto the memory chip 20A. Hence, the electrical connectionof the logic chip 10A and the memory chip 20A is established via thebumps 29 and the pads 24.

FIG. 15 is a cross-sectional view of the portion of the logic chip 10Ain the multi-chip semiconductor apparatus, which portion is indicated by“II” in FIG. 13.

In FIG. 15, the elements that are essentially the same as correspondingelements in FIG. 14 are designated by the same reference numerals, forthe sake of simplicity of description.

As shown in FIG. 15, the electrode 40 (called the second electrode) thatconstitutes the bump 29 in FIG. 13 is formed on the large-size buswiring layer 38A. The wiring layer 38A is provided to electricallyconnect the electrode 40 (the second electrode) and the electrode 36(the first electrode) that constitutes the contact 28 in FIG. 13. Thewiring layer 38A does extend in the longitudinal direction as the wiringlayer 38 of the memory chip 20A.

When the logic chip 10A is overlaid onto the memory chip 20A, theelectrode 40 (or the bump 29) contacts the electrode 42 (or the pad 24)so that the electrical connection is established. Similarly, all thebumps 29 on the logic chip 10A contact the corresponding pads 24 on thelarge-size bus 30A of the memory chip 20A so that the electricalconnections are established when the logic chip 10A is overlaid onto thememory chip 20A to form the multi-chip semiconductor apparatus.

Consequently, the function blocks 27 ₁-27 ₃ of the logic chip 10A areinterconnected by the large-size bus 30A of the memory chip 20A. Inother words, the large-size bus 30A is shared by the logic chip 10A andthe memory chip 20A. The dotted lines indicated on the logic chip 10A inFIG. 13 show the positions of the corresponding signal lines of thelarge-size bus 30A on the memory chip 20A when the former chip isoverlaid onto the latter chip.

In the above embodiment of FIG. 13, the plural contacts 23 and theplural pads 24 are connected onto each of the signal lines of thelarge-size bus 30A. However, the present invention is not limited tothis embodiment. The multi-chip semiconductor apparatus of the inventionmay be configured such that one contact 23 and plural pads 24 areconnected onto each of the signal lines of the large-size bus 30A.Alternatively, the multi-chip semiconductor apparatus of the inventionmay be configured such that plural contacts 23 and one pad 24 areconnected onto each of the signal lines of the large-size bus 30A.

Further, in the above embodiment of FIG. 14, the number of the contacts23 and the number of the pads 24 both connected to each signal line ofthe large-size bus 30A are equal to each other. Alternatively, themulti-chip semiconductor apparatus of the invention may be configuredsuch that the number of the contacts 23 and the number of the pads 24both connected to one of the signal lines of the large-size bus 30A aredifferent from those connected to another signal line of the large-sizebus 30A. Further, in a case in which the logic chip 10A is not dividedinto a plurality of function blocks and is comprised of a signalfunction block (for example, the function block 27 ₂ only), the contacts28 and the bumps 29 may be provided on the function block 27 ₂ only.

In the above-described embodiment, the large-size bus 30A is provided onthe memory chip 20A. Alternatively, the large-size bus 30A may beprovided on the logic chip 10A.

The interface of the multi-chip semiconductor apparatus of FIG. 13 withan external device is provided through the logic chip 10A. In theembodiment of FIG. 13, the logic chip 10A has a size smaller than thesize of the memory chip 20A. In the logic chip 10A, there is no spaceneeded to form the external connection electrodes. For this reason, theexternal connection pads 26 are provided in the peripheral portions ofthe memory chip 20A which do not interfere with the logic chip 10A. Theexternal connection pads 26 are respectively connected to the contacts25 on each function block via the large-size wiring 43. For example, theexternal connection pads 26 are constructed in the same manner as theelectrode 36 (the first electrode) in FIG. 14. The pads 26 are exposedat the contact opening in the insulating layer. The large-size wiring 43is provided in the large-size bus wiring layer 38 that is formed on theinsulating layer 37. The contacts 25 are constructed in the same manneras the electrode 42 (the second electrode). The contacts 25 are notconnected directly to the internal circuits of the memory chip 20A.

In the logic chip 10A, the contacts 31 and the electrodes 32 (such asthe bumps) are provided. The contacts 31 are connected to thecorresponding one of the function blocks 27 ₁-27 ₃, and the electrodes32 are respectively connected to the contacts 32. The contacts 31 andthe electrodes 32 are constructed in the same manner as the contacts 28and the bumps 29. When the logic chip 10A is overlaid onto the memorychip 20A, the electrodes 32 respectively contact the external connectionpads 26 so that the electrical connections of the function blocks 27₁-27 ₃ and the pads 26 are established. Further, the external connectionof the pads 26 is produced through wire bonding or tape automatedbonding (TAB).

As described in the foregoing, according to the first preferredembodiment of the multi-chip semiconductor apparatus, the large-size busconnection to constitute the large-size bus 30A has a small parasiticcapacity and enables the operation at a low driving voltage, and it ispossible to provide a high-speed operation of the semiconductorapparatus with low power consumption. The multi-chip semiconductorapparatus of the present embodiment does not require the I/O devicesthat are needed to connect the logic chip 10A and the memory chip 20A asin the conventional multi-chip semiconductor apparatus. According to themulti-chip semiconductor apparatus of the present embodiment, the delaytime is shortened and the power consumption is reduced.

Next, FIG. 16 shows a second preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

In FIG. 16, the elements that are essentially the same as correspondingelements in FIG. 13 are designated by the same reference numerals, and adescription thereof will be omitted.

As shown, the multi-chip semiconductor apparatus of this embodimentincludes the logic chip 10B and the memory chip 20B. The multi-chipsemiconductor apparatus of this embodiment shown in FIG. 16 isessentially the same as the previous embodiment shown in FIG. 13, butdiffers from it in the matters which will be described in the following.

In the present embodiment, the logic chip 10B further includes thefourth function block 27 ₄, in addition to the function blocks 27 ₁-27 ₃as in the previous embodiment of FIG. 13. The function block 27 ₂ ofthis embodiment is different in size from the function block 27 ₂ of theprevious embodiment of FIG. 13, but they are the same in the meaning ofa single function block and designed by the same reference numerals. Forother elements of the multi-chip semiconductor apparatus, the samereference numerals are used in such meaning.

In the present embodiment, in order to connect the function block 27 ₄with the large-size bus 30A of the memory chip 20B, the secondarylarge-size bus 40A is provided on the logic chip 10B, and the secondarylarge-size bus 40A interconnects the function block 27 ₂ and thefunction block 27 ₄. The secondary large-size bus 40A becomes a branchbus of the large-size bus 30A when the logic chip 10B is overlaid ontothe memory chip 20B. In other words, the large-size bus is provided oneach of the logic chip 10B and the memory chip 20B. The respectivesignal lines of the large-size bus 40A are connected to the functionblock 27 ₄ at the contacts 28. The projecting electrodes 29 a (or thebumps 29 a) are provided on the respective signal lines of thelarge-size bus 40A in the function block 27 ₂. The electrodes 29 a areconstructed in the same manner as the electrodes 29.

In the present embodiment, when the logic chip 10B is overlaid onto thememory chip 20B, the projecting electrodes 29 a are coupled to therespective pads 24 a that are provided on the large-size bus 30A of thememory chip 20B. For this purpose, the locations where the electrodes 29a are disposed in the logic chip 10B correspond to the locations wherethe pads 24 are disposed in the memory chip 20B. The function block 27 ₄is electrically connected to the large-size bus 30A via the secondarylarge-size bus 40A.

FIG. 17 shows a third preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

In FIG. 17, the elements that are essentially the same as correspondingelements in the preceding embodiments are designated by the samereference numerals, and a description thereof will be omitted.

As shown, the multi-chip semiconductor apparatus of this embodimentincludes the logic chip 10C and the memory chip 20C. Similar to theprevious embodiment of FIG. 16, the logic chip 10C of the presentembodiment includes the four function blocks 27 ₁-27 ₄, but thearrangement thereof in the present embodiment is different from that inthe previous embodiment. When the logic chip 10C is overlaid onto thememory chip 20C, the function blocks 27 ₁-27 ₄ are not located on thestraight-line positions of the large-size bus 30A of the memory chip20C. The function blocks 27 ₁-27 ₄ cannot be connected with thelarge-size bus 30A in the same manner as in the previous embodiments ofFIG. 13 and FIG. 16.

In the present embodiment, in order to connect the function blocks 27₁-27 ₄ with the large-size bus 30A of the memory chip 20B, the secondarylarge-size bus 40B is provided on the logic chip 10C, and the secondarylarge-size bus 40B interconnects the function blocks 27 ₁-27 ₄ as shownin FIG. 17. To establish appropriate connection between the secondarylarge-size bus 40B and the function blocks 27 ₁-27 ₄, the secondarylarge-size bus 40B is arranged in the bent-back formation, not thestraight-line formation. The projecting electrodes 29 (or the bumps 29)are provided on the respective signal lines of the large-size bus 40B inthe center of the function blocks 27 ₁-27 ₄. The electrodes 29 areconstructed at the slanted-line positions in the center of thelarge-size bus 40B.

In the present embodiment, when the logic chip 10C is overlaid onto thememory chip 20C, the projecting electrodes 29 are coupled to therespective pads 24 a that are provided on the large-size bus 30A of thememory chip 20C. For this purpose, the locations where the electrodes 29are disposed in the logic chip 10C correspond to the locations where thepads 24 a are disposed in the memory chip 20C. The electrical connectionbetween the large-size bus 40B of the logic chip 10C and the large-sizebus 30A of the memory chip 20C is established by the connections of theelectrodes 29 and the pads 24 a.

FIG. 18 shows a fourth preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

In FIG. 18, the elements that are essentially the same as correspondingelements in the preceding embodiments are designated by the samereference numerals, and a description thereof will be omitted.

As shown, the multi-chip semiconductor apparatus of this embodimentincludes the logic chip 10D and the memory chip 20D. The memory chip 20Dof the present embodiment includes the four memory blocks 21 ₁ through21 ₄, the six I/O devices 22 ₁ through 22 ₆, and the two parallellarge-size buses 30B₁ and 30B₂. Each of the large-size buses 30B₁ and30B₂ is provided in the large-size wiring layer. The bus 30B₁interconnects the I/O devices 22 ₁, 22 ₃ and 22 ₆ via the contacts 23.The pads 24 are arranged at the two intermediate locations on therespective signal lines of the bus 30B₁ in the slanted-line formation asshown in FIG. 18. Similarly, the bus 30B₂ interconnects the I/O devices22 ₂, 22 ₄ and 22 ₅ via the contacts 23. The pads 24 are arranged at thetwo intermediate locations on the respective signal lines of the bus30B₂ in the slanted-line formation as shown in FIG. 18. The arrangementof the I/O devices 22 ₁ thorough 22 ₆ shown in FIG. 19 is designed inorder to make effective use of the surface area of the chip.

The logic chip 10D of the present embodiment includes the two functionblocks 27 ₁ and 27 ₂, and the two parallel large-size buses 40C₁ and40C₂. The buses 40C₁ and 40C₂ are parallel to each other and extend inthe direction of the short side of the rectangular logic chip 10D. Thesebuses 40C₁ and 40C₂ are arranged such that, when the logic chip 10D isoverlaid onto the memory chip 20D, the buses 40C₁ and 40C₂ of the logicchip 10D are electrically connected with the buses 30B₁ and 30B₂ of thememory chip 20D. The signal lines of the bus 40C₁ are connected to thefunction block 27 ₁ via the contacts 28. The projecting electrodes 29(or the bumps 29) are formed on the signal lines of the bus 40C₁ suchthat two electrodes 29 are provided for each of the signal lines of thebus 40C₁. Similarly, the signal lines of the bus 40C₂ are connected tothe function block 27 ₂ via the contacts 28. The projecting electrodes29 (or the bumps 29) are formed on the signal lines of the bus 40C₂ suchthat two electrodes 29 are provided for each of the signal lines of thebus 40C₂.

In the present embodiment, when the logic chip 10D is overlaid onto thememory chip 20D, the projecting electrodes 29 of the logic chip 10D arecoupled to the respective pads 24 that are provided on the large-sizebuses 30B₁ and 30B₂ of the memory chip 20D. For this purpose, thelocations where the electrodes 29 are disposed in the logic chip 10Dcorrespond to the locations where the pads 24 are disposed in the memorychip 20D. The connection of the electrodes 29 and the pads 24 ▪ enablesthe electrical connection between the large-size buses 40C₁ and 40C₂ ofthe logic chip 10D and the large-size buses 30B₁ and 30B₂ of the memorychip 20D. The signal lines of the bus 30B₁ and the signal lines of thebus 30B₂ in the memory chip 20D are interconnected by the buses 40C₁ and40C₂, and they are connected to the function blocks 27 ₁ and 27 ₂ of thelogic chip 10D. Namely, in the present embodiment, the plural buses 30B₁and 30B₂ on one of the two chips are interconnected by the plural buses40C₁ and 40C₂ on the other chip.

FIG. 19 shows a fifth preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

In FIG. 19, the elements that are essentially the same as correspondingelements in the preceding embodiments are designated by the samereference numerals, and a description thereof will be omitted.

As shown, the multi-chip semiconductor apparatus of this embodimentincludes the logic chip 10E and the memory chip 20E. The memory chip 20Eof the present embodiment includes the eight memory blocks 21 ₁ through21 ₈, the eight I/O devices 22 ₁ through 22 ₈, and the loop-likelarge-size bus 30C. The I/O devices 22 ₁ through 22 ₈ are connected tothe signal lines of the bus 30C via the contacts 23. The pads 24 areprovided on the signal lines of the bus 30C, and the signal lines of thebus 30C are connected to the logic chip 10E via the pads 24.

The logic chip 10E of the present embodiment includes the three functionblocks 27 ₁ through 27 ₃, the contacts 28 and the projecting electrodes29 (or the bumps 29). The locations where the electrodes 29 are disposedin the logic chip 10E correspond to the locations where the pads 24 aredisposed in the memory chip 20E. When the logic chip 10E is overlaidonto the memory chip 20E, the electrodes 29 contact the pads 24 of thememory chip 20E so that the function blocks 27 ₁ through 27 ₃ of thelogic chip 10E are connected with the large-size bus 30C via theconnection of the electrodes 29 and the pads 24.

In the present embodiment, the large-size bus 30C is arranged in theloop-like formation, and it is possible to increase the flexibility ofconnection of the bus and the internal circuits. The large-size bus 30Chas no terminal end, and there is no reflection of the signaltransmitted. The multi-chip semiconductor apparatus of the presentembodiment is more effective in providing high-speed operation with lowpower consumption.

FIG. 20 shows a variation of the multi-chip semiconductor apparatusshown in FIG. 19.

In FIG. 20, the elements that are essentially the same as correspondingelements in FIG. 19 are designated by the same reference numerals, and adescription thereof will be omitted.

As shown, the multi-chip semiconductor apparatus of this embodimentincludes the logic chip 10F and the memory chip 20F. The multi-chipsemiconductor apparatus of this embodiment is essentially the same asthat of FIG. 19 but it differs from that of FIG. 19 in the followingmatters.

The logic chip 10F is larger in size than the memory chip 20F. Theloop-like large-size bus 40C is provided on the logic chip 10F, insteadof the memory chip 20E. The pads 49 are provided on the logic chip 10Fat the peripheral positions thereof, and the pads 49 are connected withan external device. When combining the logic chip 10F and the memorychip 20F, the memory chip 20F is overlaid onto the logic chip 10F.

In the logic chip 10F of the present embodiment, the signal lines of theloop-like large-size bus 40C are connected to each of the functionblocks 27 ₁ through 27 ₃ via the contacts 46. The pads 47 are providedon the signal lines of the bus 40C, and the signal lines of the bus 40Care connected with the memory chip 20F via the pads 47.

The memory chip 20F of the present embodiment includes the eight memoryblocks 21 ₁ through 21 ₈, the eight I/O devices 22 ₁ through 22 ₈, thecontacts 44, and the projecting electrodes 45 (or the bumps 45). The I/Odevices 22 ₁ through 22 ₈ are coupled to the contacts 44, and thecontacts 44 are coupled to the projecting electrodes 45 through thelarge-size bus wiring layer as shown in FIG. 15.

When the memory chip 20F is overlaid onto the logic chip 10F, theelectrodes 45 contact the pads 47 of the logic chip 10F so that thememory blocks 21 ₁ through 21 ₈ of the memory chip 20F are connectedwith the large-size bus 40C via the connection of the electrodes 45 andthe pads 47. For this purpose, the locations where the electrodes 45 aredisposed in the memory chip 20F correspond to the locations where thepads 47 are disposed in the logic chip 10F. The memory blocks 21 ₁through 21 ₈ of the memory chip 20F are interconnected through the I/Odevices 22 ₁ through 22 ₈ and the large-size bus 40C.

FIG. 21 shows a sixth preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

In FIG. 21, the elements that are essentially the same as correspondingelements in the preceding embodiments are designated by the samereference numerals, and a description thereof will be omitted.

As shown, the multi-chip semiconductor apparatus of this embodimentincludes the logic chip 10G and the memory chip 20G. The memory chip 20Gof the present embodiment includes the eight memory blocks 21 ₁ through21 ₈, the eight I/O devices 22 ₁ through 22 ₈, and the U-shapedlarge-size bus 30D.

The U-shaped large-size bus 30D is useful when the formation of theloop-like large-size bus is impossible. The signal lines of the bus 30Dare connected to the I/O devices 22 ₁ through 22 ₈ via the contacts 23.One end of each of the signal lines of the bus 30D is terminated at theI/D device 22 ₁, and the other end of each of the signal lines of thebus 30D is terminated at the I/O device 22 ₂. The pads 24 are providedon the signal lines of the bus 30D, and the signal lines of the bus 30Dare connected to the logic chip 10G via the pads 24.

The logic chip 10G of the present embodiment includes the three functionblocks 27 ₁ through 27 ₃, the contacts 28 and the projecting electrodes29 (or the bumps 29). The locations where the electrodes 29 are disposedin the logic chip 10G correspond to the locations where the pads 24 aredisposed in the memory chip 20G. When the logic chip 10G is overlaidonto the memory chip 20G, the electrodes 29 contact the pads 24 of thememory chip 20G so that the function blocks 27 ₁ through 27 ₃ of thelogic chip 10G are connected with the U-shaped large-size bus 30D viathe connection of the electrodes 29 and the pads 24.

FIG. 22 shows a seventh preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

In FIG. 22, the elements that are essentially the same as correspondingelements in the preceding embodiments are designated by the samereference numerals, and a description thereof will be omitted.

As shown, the multi-chip semiconductor apparatus of this embodimentincludes the logic chip 10H and the memory chip 20H. The multi-chipsemiconductor apparatus of this embodiment is essentially the same asthat of FIG. 21 but it differs from that of FIG. 21 in the followingmatters.

The large-size bus 40D is provided on the logic chip 10H. When the logicchip 10H is overlaid onto the memory chip 20H, the large-size bus 40Dand the U-shaped large-size bus 30D are combined together to form theloop-like large-size bus. For this purpose, the projecting electrodes 29b (or the bumps 29 b) are provided at the ends of the signal lines ofthe bus 40D, and the pads 24 b are provided on the signal lines of thebus 30D at the corresponding locations thereof.

FIG. 23 shows an eighth preferred embodiment of the multi-chipsemiconductor apparatus of the invention. FIG. 24 is a cross-sectionalview of the multi-chip semiconductor apparatus shown in FIG. 23.

In FIG. 23, the elements that are essentially the same as correspondingelements in the preceding embodiments are designated by the samereference numerals, and a description thereof will be omitted.

As shown, the multi-chip semiconductor apparatus of this embodimentincludes the logic chip 10I and the memory chip 20I. The multi-chipsemiconductor apparatus of the present embodiment is characterized bythe large-size bus connection that is formed into the multi-layer wiringstructure.

The memory chip 20I of the present embodiment has the two large-size buswiring layers including the first wiring layer and the second wiringlayer. The first wiring layer provides the large-size buses 30B₁ and30B₂, and the second wiring layer provides the large-size buses 30E₁ and30E₂. In FIG. 23, the large-size buses 30E₁ and 30E₂ of the secondwiring layer are indicated by the double lines. In the presentembodiment, the first wiring layer and the second wiring layer arearranged so that they are perpendicular to each other. The large-sizebuses 30B₁ and 30B₂ of the first wiring layer and large-size buses 30E₁and 30E₂ of the second wiring layer are interconnected via the throughholes 50 (or the vias 50). The pads 24 c are provided on the signallines of the second-wiring-layer buses 30E₁ and 30E₂, and these buses30E₁ and 30E₂ are connected to the logic chip 10I via the pads 24 c.Similar to the previous embodiment, the projecting electrodes 29 of thelogic chip 10I contact the pads 24 c of the memory chip 20I when thelogic chip 10I is overlaid onto the memory chip 20I.

FIG. 24 shows the relationship between the first wiring layer and thesecond wiring layer in the multi-chip semiconductor apparatus of thepresent embodiment.

As shown, the large-size bus of the first wiring layer 38 and thelarge-size bus of the second wiring layer 51 are electrically connectedto each other via the through hole 50. The second wiring layer 51 iscovered with the cover layer 53. In the case of the single-layerstructure, the insulating layer 39 serves as the cover layer. However,as shown in FIG. 24, in the case of the multiple-layer structure, theinsulating layer 39 serves as the inter-layer insulating layer. The pad52 is formed in the cover layer 53 at the location where the secondwiring layer 51 is partially exposed. The pad 52 is provided to make theelectrical connection with the logic chip 1 oI. The pad 52 in thisembodiment corresponds to the pad 24 c shown in FIG. 23.

In the embodiment of FIG. 24, the large-size bus of the first wiringlayer 38 and the large-size bus of the second wiring layer 51 areparallel to each other, which is different from the configuration of themulti-chip semiconductor apparatus of FIG. 23. However, the embodimentof FIG. 24 is given for the sake of illustration of the relationshipbetween the first wiring layer and the second wiring layer.

Further, in the present embodiment, the electrical connection betweenthe large-size buses 30B₁ and 30B₂ of the first wiring layer is made bythe large-size buses 30E₁ and 30E₂ of the second wiring layer. Hence,dissimilar to the logic chip 10D of the previous embodiment in FIG. 18,the logic chip 10I of the present embodiment is not provided with thebuses 40C₁ and 40C₂.

The multi-layer wiring structure of the present invention is not limitedto the two-layer wiring structure as in the above embodiment. It ispossible that the three or more layer wiring structure be configuredinto the multi-chip semiconductor apparatus.

FIG. 25 shows a ninth preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

In FIG. 25, the elements that are essentially the same as correspondingelements in the preceding embodiments are designated by the samereference numerals, and a description thereof will be omitted.

As shown, the multi-chip semiconductor apparatus of this embodimentincludes the logic chip 10J and the memory chip 20J. The multi-chipsemiconductor apparatus of the present embodiment is characterized inthat the internal circuits of the chips are interconnected by using thelarge-size bus. The large-size bus 58 interconnects the function block27 ₁ and the function block 27 ₃ in the logic chip 10J. One end of thelarge-size bus 58 is coupled to the function block 27 ₁ via the contact60, and the other end of the large-size bus 58 is coupled to thefunction block 27 ₃ via the contact 60.

Further, in the present embodiment, the large-size bus 54 is provided onthe memory chip 20J in order to interconnect the function block 27 ₁ andthe function block 27 ₃ in the logic chip 10J when the logic chip 10J isoverlaid onto the memory chip 20J. In each of the function blocks 27 ₁and 27 ₃, the contact 62 and the projecting electrode 61 (or the bump61) are provided. The pads 55 are provided at both ends of thelarge-size bus 54 in the large-size bus 54 of the memory chip 20J, andthe pads 55 are connected to the projecting electrodes 61 when the twochips are combined together. The function blocks 27 ₁ and 27 ₃ areelectrically connected to each other by the large-size bus 54 of thememory chip 20J.

Further, in the present embodiment, the large-size bus 59 is provided onthe logic chip 10J in order to electrically connect the pad-likeelectrodes 57 of the large-size bus 30 of the memory chip 20J. Theelectrodes 57 are electrically connected with the contacts 56 which areconnected to the internal circuits of the memory chip 20J. The contacts56 and the electrodes 57 are configured in the same manner as thosecorresponding elements in FIG. 14.

As described above, the internal circuits of the chips areinterconnected by using the large-size bus.

The memory chips 20A through 20J of the above embodiments may bearranged as the memory blocks in the large-scale integration (LSI)system. In such a case, the multi-purpose LSI system may be constructedby the multi-chip semiconductor apparatus of the present invention.

FIG. 26 shows a configuration of the LSI system in which the abovematters are taken into consideration.

As shown in FIG. 26, the LSI system generally includes the non-volatilememory 65 (such as a flash memory), the high-speed memory 66 (such as acash memory), and the mass-storage memory 67 (such as a DRAM). Thesememory blocks in the memory portion of the LSI system are interconnectedby the large-size bus. Further, the function blocks 68 through 70 in thelogic portion of the LSI system are interconnected by the large-sizebus. Each of the function blocks 68-70 can access the memory blocks65-68 through the large-size bus.

In the following, several embodiments of the multi-chip semiconductorapparatus of the invention are applied to the LSI system shown in FIG.26.

FIG. 27 shows a tenth preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

In FIG. 27, the elements that are essentially the same as correspondingelements in the preceding embodiments are designated by the samereference numerals, and a description thereof will be omitted.

As shown, the multi-chip semiconductor apparatus of this embodimentincludes the logic chip 10K and the memory chip 20K. The memory chip 20Kof the present embodiment includes the non-volatile memory 65 (such as aflash memory), the high-speed memory 66 (such as an SRAM), and themass-storage memory 67 (such as a DRAM). These memory blocks areinterconnected by the loop-like large-size bus 30. In other words, thememory chip 20K corresponds to the memory chip 20E of FIG. 19 in whichthe memory blocks are configured into the flash memory, the SRAM and theDRAM.

The logic chip 10K of the present embodiment includes the functionblocks 27 ₁ through 27 ₃ (corresponding to the function blocks 68through 70 in FIG. 26), the contacts 28 and the projecting electrodes 29(or the bumps 29). The logic chip 10K corresponds to the logic chip 10Ein FIG. 19. The logic chip 10K is overlaid onto the memory chip 20K.

FIG. 28 shows an eleventh preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

In FIG. 28, the elements that are essentially the same as correspondingelements in the preceding embodiments are designated by the samereference numerals, and a description thereof will be omitted.

As shown, the multi-chip semiconductor apparatus of this embodimentincludes the logic chip 10L and the three separate memory chips. Thememory chips of the present embodiment include the non-volatile memory65A (such as a flash memory), the high-speed memory 66A (such as anSRAM), and the mass-storage memory 67A (such as a DRAM). These memorychips are overlaid onto the logic chip 10L. Each of the memory blocks65A through 67A includes the internal circuit, the contacts 44 and theprojecting electrodes 45 (or the bumps 45).

The logic chip 10L of the present embodiment is larger in size than thesum of the three memory chips 65A through 67A. The logic chip 10Lincludes the function blocks 27 ₁ through 27 ₃, the contacts 46, thepads 47, and the loop-like large-size bus 40C. The bus 40C interconnectsthe function blocks 27 ₁ through 27 ₃ via the contacts 46. The pads 47are provided on the signal lines of the bus 40C, and, when the memorychips 66A through 67A are overlaid onto the logic chip 10L, theelectrodes 45 contact the pads 47 so that the memory chips 66A through67A are interconnected by the bus 40C.

In the present embodiment, it is not necessarily required that thelarge-size bus 40C be provided on the logic chip 10L. For example,similar to the seventh preferred embodiment of FIG. 22, the large-sizebus may be provided on the memory chip 67A, and when the memory chipsand the logic chip are combined together, the large-size bus of thememory chip 67A is connected to the large-size bus of the logic chip toform the loop-like large-size bus.

FIG. 29 shows a twelfth preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

In FIG. 29, the elements that are essentially the same as correspondingelements in the preceding embodiments are designated by the samereference numerals, and a description thereof will be omitted.

As shown, the multi-chip semiconductor apparatus of this embodimentincludes the logic chip 10M and the three separate memory chips. Thememory chips of the present embodiment include the non-volatile memory65B (such as a flash memory), the high-speed memory 66B (such as anSRAM), and the mass-storage memory 67B (such as a DRAM). The logic chip10M is overlaid onto the three memory chips. The logic chip 10M of thepresent embodiment is smaller in size than the sum of the three memorychips 65B through 67B. Each of the memory blocks 65B through 67Bincludes the internal circuit, the projecting electrodes 71 (or thebumps 71), the external connection pads 73, and the large-size bus 71.The bus 71 interconnects the electrodes 71 and the pads 73.

The logic chip 10M includes the loop-like large-size bus 40C. The pads47 are provided on the signal lines of the bus 40C, and, when the logicchip 10M is overlaid onto the memory chips 65B through 67B, the pads 47contact the electrodes 45 so that the memory chips 65B through 67B areinterconnected by the bus 40C.

FIG. 30 is a perspective view of the multi-chip semiconductor apparatusin FIG. 29 when the logic chip 10M is overlaid onto the memory chips 65Bthrough 67B. The memory chips 65B through 67B are mounted on the stageof the package. By using the bonding wires 76, the external connectionpads 71 are electrically connected to the electrodes 75 of the stage ofthe package. The logic chip 10M and the memory chips 65B through 67B arecovered with a resin material (not shown) of the package.

FIG. 31 shows a thirteenth preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

In FIG. 31, the elements that are essentially the same as correspondingelements in the preceding embodiments are designated by the samereference numerals, and a description thereof will be omitted.

As shown, the multi-chip semiconductor apparatus of this embodimentincludes the logic chip 10N, the non-volatile memory 65C (such as aflash memory), the high-speed memory 66C (such as an SRAM), and themass-storage memory 67C (such as a DRAM). The multi-chip semiconductorapparatus of the present embodiment is a variation of the multi-chipsemiconductor apparatus of FIG. 29.

The memory chip 67C is overlaid onto the logic chip 10N and the twomemory chips 65C and 66C. The memory chip 67C of the present embodimentis smaller in size than the sum of the two memory chips 65C and 66C andthe logic chip 10N. The loop-like large-size bus 30E is provided on thememory chip 67C. The large-size bus 30E₁ is provided on the memory chip65C, and the large-size bus 30E₂ is provided on the memory chip 66C. Thelarge-size buses 40D₁ and 40D₂ are provided on the logic chip 10N.

The pads 24 are provided on the signal lines of the bus 30E of thememory chip 67C, and, when the memory chip 67C is overlaid onto thelogic chip 10M and the memory chips 65C and 66C, the pads 24 contact theelectrodes 29 so that the memory chips 65C and 66C and the logic chip10N are interconnected by the buses 30E, 30E₁, 30E₂, 40D₁ and 40D₂.

In the present embodiment, the memory chips 65C, 66C and 67C areconsidered the non-volatile memory, the high-speed memory and themass-storage memory, for the sake of convenience. However, the presentinvention is not limited to this embodiment. For example, the memorychip 67C may be the high-speed memory. The logic chip 10N may be amemory chip, and one of the memory chips 65C-67C may be the logic chip.

FIG. 32 shows a fourteenth preferred embodiment of the multi-chipsemiconductor apparatus of the invention.

In FIG. 32, the elements that are essentially the same as correspondingelements in the preceding embodiments are designated by the samereference numerals, and a description thereof will be omitted.

As shown, the multi-chip semiconductor apparatus of this embodimentincludes the four chips 80 ₁ through 80 ₄. The longitudinal sides of thechips 80 ₁ and 80 ₂ confront each other, and the chips 80 ₃ and 80 ₄ areoverlaid onto the chips 80 ₁ and 80 ₂. After the chips are combinedtogether, the loop-like large-size bus 81 is formed.

Each of the chips 80 ₁ and 80 ₂ includes the internal circuit, thelarge-size bus 81, the contacts 23, the pads 24, and the externalconnection pads 77. Each of the chips 80 ₃ and 80 ₄ includes theinternal circuit, the large-size bus 81, the contacts 28 and theprojecting electrodes 29.

In the present embodiment, when the chips 80 ₃ and 80 ₄ are overlaidonto the chips 80 ₁ and 80 ₂, the projecting electrodes 28 contact thepads 23 so that the loop-like large-size bus 81 is formed and the fourchips are interconnected by the bus 81.

FIG. 33 is a perspective view of the multi-chip semiconductor apparatusin FIG. 32 when the chips 80 ₃ and 80 ₄ are overlaid onto the chips 80 ₁and 80 ₂. The chips 80 ₁ and 80 ₂ are mounted on the stage of thepackage. By using the bonding wires 76, the external connection pads 77are electrically connected to the electrodes 75 of the stage of thepackage. The chips 80 ₁ through 80 ₄ are covered with a resin material(not shown) of the package.

FIG. 34A and FIG. 34B show a fifteenth preferred embodiment of themulti-chip semiconductor apparatus of the invention.

In FIG. 34A and FIG. 34B, the elements that are essentially the same ascorresponding elements in the preceding embodiments are designated bythe same reference numerals, and a description thereof will be omitted.

As shown, the multi-chip semiconductor apparatus of this embodimentincludes the three chips 85 ₁ through 85 ₃. The longitudinal sides ofthe chips 85 ₁ and 85 ₂ confront each other, and the chip 85 ₃ isoverlaid onto the chips 85 ₁ and 85 ₂. After the chips are combinedtogether, the large-size buses 86 are formed.

Each of the chips 85 ₁ and 85 ₂ includes the internal circuit, thelarge-size bus 86, the contacts 23, the pads 24, and the externalconnection pads 77. The chip 85 ₃ includes the internal circuit, thelarge-size bus 86 ₃, the contacts 28 and the projecting electrodes 29.

In the present embodiment, when the chips 85 ₃ is overlaid onto thechips 85 ₁ and 85 ₂, the projecting electrodes 28 contact the pads 23 sothat the large-size buses 86 are combined and the three chips 85 areinterconnected by the buses 86.

FIG. 34B is a perspective view of the multi-chip semiconductor apparatusin FIG. 34A when the chip 85 ₃ is overlaid onto the chips 85 ₁ and 85 ₂.The chips 80 ₁ and 80 ₂ are mounted on the stage of the package.

FIG. 35 shows another configuration of the LSI system, which isdifferent from the LSI system in FIG. 26.

As shown in FIG. 35, the LSI system generally includes the non-volatilememory 65 (such as a flash memory), the mass-storage memory 67 (such asa DRAM), the frame memory 91, the large-size bus, and the logic chip 68.The frame memory 91 stores image data. The logic chip 68 performsimage-processing procedures for the image data stored in the framememory 91, and delivers the processed image data to the memory chips 65and 67. In the actual procedures, the image data is read from the framememory 91, and the processed image data produced by the logic chip 68 isdelivered to the memory chips 65 and 67. It is difficult for the LSIsystem in FIG. 26 to efficiently perform the above parallel processesbecause the large-size bus is shared by the respective chips.

In the LSI system of the present embodiment, the above matters are takeninto consideration. The frame memory 91 is not connected to thelarge-size bus, and it is connected directly to the logic chip 68 viathe bus 92. It is preferred that the bus 92 is also provided in thelarge-size bus wiring layer.

FIG. 36 shows a sixteenth preferred embodiment of the multi-chipsemiconductor apparatus of the invention which has the systemconfiguration shown in FIG. 35.

In FIG. 36, the elements that are essentially the same as correspondingelements in the preceding embodiments are designated by the samereference numerals, and a description thereof will be omitted.

As shown, the multi-chip semiconductor apparatus of this embodimentincludes the non-volatile memory chip 65D, the mass-storage memory 67D,the frame memory 91 and the logic chip 68D. The logic chip 68D isoverlaid onto the three memory chips 65D, 67D and 91. Each of the memorychips 65D, 67D and 91 includes the internal circuit, the contacts 93,the external connection pads 94, and the large-size bus 88. Each of thememory chips 65D, 67D and 91 includes the contacts 95 and the projectingelectrodes 96 (or the bumps 96). The large-size bus 88 interconnects thecontacts 95 and the electrodes 96. The electrodes 96 are provided tomake the electrical connection of the logic chip 68D and the memorychips 65D, 67D and 91.

The logic chip 68D of the present embodiment includes the large-size bus40E, the large-size bus 40E₁, the internal circuit, the contacts 97, andthe pads 98. The pads 98 are connected to the contacts 97 via thelarge-size bus wiring layer. The bus 40E is connected to the internalcircuit via the contacts 103. The pads 104 are provided at both ends ofthe signal lines of the bus 40E, and the pads 104 are used forconnection with the corresponding memory chips. The contacts 101 areprovided at one ends of the signal lines of the bus 40E₁ and the pads102 are provided at the other ends of the signal lines of the bus 40E₁.The pads 102 are used for connection with the corresponding memorychips.

When the logic chip 68D is overlaid onto the memory chips 65D, 67D and91, the pads 104 contact the electrodes 96, and the connection of thelogic chip 68D and the memory chips 65D and 67D is established by thebus 40E. Further, the pads 102 of the logic chip 68D contact theelectrodes 96 of the frame memory 91, and the connection of the logicchip 68D and the frame memory 91 is established by the bus 40E₁. Hence,the multi-chip semiconductor apparatus in FIG. 36 has the systemconfiguration in FIG. 35.

FIG. 37 shows another configuration of the multi-chip semiconductorapparatus that is different from the multi-chip semiconductor apparatusof FIG. 12.

In the present embodiment, the large-size bus connection is used by someof the multiple chips, and the normal-size bus connection is used by theother chips. As shown in FIG. 37, the multi-chip semiconductor apparatusof this embodiment includes the logic chip 10Q and the memory chip 20Q.The memory chip 20Q includes the large-size bus 30Q that interconnectsthe memory blocks. The logic chip 10Q includes the normal-size bus 103that interconnects the function blocks. The logic chip 10Q is connectedto an external device through the I/O device. The electrical connectionbetween the memory chip 20Q and the logic chip 10Q is established by theconnection of the I/O device of the logic chip 10Q to the large-size bus30Q of the memory chip 20Q.

According to the multi-chip semiconductor apparatus of the presentembodiment, the delay time is shortened and the power consumption isreduced in comparison with the conventional multi-chip semiconductorapparatus.

Next, FIG. 38 shows another preferred embodiment of the semiconductorapparatus of the invention.

A semiconductor apparatus is known wherein an electrostatic discharge(ESD) device is connected to an external terminal (such as an I/Oterminal) in order to protect the internal circuits (such as I/Odevices) connected to the external terminal against electrostaticbreakdown. The ESD device usually includes a resistor and an MOStransistor, the transistor having a source and a gate connected to theground. For the purpose of protecting the internal circuits, the ESDdevice has a large size adequate to withstand a large amount of electriccurrent flowing from the ESD device to the ground. It is necessary todispose the ESD device in the vicinity of the internal circuits in orderto effectively protect the internal circuits.

However, the ESD device has a large size and does not relate to thenormal operation of the semiconductor apparatus. It is desirable thatthe ESD device be arranged at a vacant location of the chip where thecircuit components are not provided. If a normal-size bus, which isprovided to connect the external terminal with the ESD device and meetthe demand for the circuit layout, is excessively long, it is difficultfor the ESD device to instantaneously escape the large amount of currentto the ground due to the wiring resistance and the parasitic capacity ofthe normal-size bus.

As the I/O devices directly affect the speed of operation of thesemiconductor apparatus, it is required to dispose the I/O devices atappropriate locations of the chip. Conventionally, there has been thetradeoff between the requirement of the layout of the I/O devices andthe demand for the layout of the ESD device.

The semiconductor apparatus of the present embodiment is configured toutilize the large-size bus connection in order to provide flexibility ofthe layout of the circuit components as well as high-speed operationwith low power consumption.

As shown in FIG. 38, in the semiconductor apparatus of the presentembodiment, a pad (or an external terminal) 310 is provided to connectthe semiconductor apparatus with an external device. The semiconductorapparatus includes an internal circuit 311, such as an I/O device, whichis connected to the pad 310. An ESD device 312 is connected to anintermediate position between the pad 310 and the internal circuit 311in order to protect the internal circuit 311 against electrostaticbreakdown as described above.

In the present embodiment, the connection between the pad 310 and theinternal circuit 311 and the connection between the pad 310 and the ESDdevice 312 via the intermediate position are established by using alarge-size bus 313. The large-size bus 313 is electrically connected tothe ESD device 312 via the contact 314. Similarly, the large-size bus313 is electrically connected to the internal circuit 311 via thecontact 314.

As described earlier, the connection of the large-size bus 313, which isformed in the wiring layer having a width in a range of 5 ▪ ▪ ▪ to 10 ▪▪ ▪ ▪ has the following advantages:

1) it provides a small electrical resistance because the width of thewiring layer is large;

2) it provides a small parasitic capacity because the inter-layerdistance between the bulk and the insulating layer and the wiringintervals of the large-size bus connection are large;

3) it is suited for a high-speed operation of semiconductor devicesbecause the time constant of the large-size bus is very small.

According to the present embodiment, the connection of the large-sizebus 313 enables the ESD device 312 to be spaced apart from the internalcircuit 311 and to effectively attain the protection of the internalcircuit 311. The demand for the layout of the ESD device in thesemiconductor apparatus can be met. It is possible that the large-sizebus 313 in the present embodiment have a length larger than thepermissible maximum length of the normal-size bus that is needed toattain the protection of the internal circuit as in a conventionalsemiconductor apparatus.

FIG. 39 is a cross-sectional view of the semiconductor apparatus shownin FIG. 38 for explaining the large-size bus 313.

As shown in FIG. 39, the multi-level wiring layer 322 is formed on thesemiconductor substrate 320. The multi-level wiring layer 322 includesthe wiring layer 322 a and the wiring layer 322 b. The wiring layers 322a and 322 b are isolated from each other by an insulating layer ofpolyimide resin. Further, an insulating layer of polyimide resin isprovided on the top surface of the upper wiring layer 322 b. For thesake of convenience, the insulating layers of the multi-level wiringlayer 322 are collectively designated by reference numeral 121.

In the semiconductor apparatus shown in FIG. 39, the multi-level wiringlayer 322 includes the electrode 323 which is connected to the wiringlayers 322 a and 322 b. The electrode 323 is electrically connected tothe diffusion layer 324 via the contacts 325 and 326 and theintermediate wiring layer. The diffusion layer 324 is formed on thesemiconductor substrate 320. The normal-size bus as in the conventionalsemiconductor apparatus is formed in the multi-level wiring layer 322.

Further, in the semiconductor apparatus of FIG. 39, the large-size buswiring layer 328 is provided on the insulating layer 327. The large-sizebus 311 in FIG. 38 is provided in the large-size bus wiring layer 328.The wiring layer 328 includes the contact 323 a that is coupled to theelectrode 323. The electrode 323 is exposed to the wiring layer 328 atthe contact hole which is formed in the insulating layer 321. The wiringlayer 328 enters the insulating layers 321 and 327 at the contact holeso that the contact 323 a is electrically connected to the electrode323. The large-size bus wiring layer 328 is larger in width andthickness than the wiring layers 322 a and 322 b of the multi-levelwiring layer 322. For example, the large-size bus wiring layer 328 has awidth in a range of 5 ▪ ▪ ▪ to 10 ▪ ▪.

In the semiconductor apparatus of FIG. 39, the cover layer 329 isprovided on the large-size bus wiring layer 328. The cover layer 329includes an opening (or a through hole) where the large-size bus wiringlayer 328 is exposed. The electrode 330 is provided at the opening ofthe cover layer 329, and the electrode 330 is used to connect thelarge-size bus 313 with another chip provided on the wiring layer 328.The electrode 330 is constructed, for example, in the form of either thebump or the pad. The electrode 330 corresponds to the pad 310 (or theexternal terminal) in FIG. 38

FIG. 40 shows a variation of the semiconductor apparatus of the presentembodiment. In FIG. 40, the elements that are essentially the same ascorresponding elements in FIG. 38 are designated by the same referencenumerals, and a description thereof will be omitted.

In the embodiment shown in FIG. 40, a normal-size bus 315 is provided toconnect the internal circuit 311 with the large-size bus 313 via thecontact 314, and a normal-size bus 316 is provided to connect the ESDdevice 312 with the large-size bus 313 via the contact 314. In thepresent embodiment, the normal-size bus 315 has a length L1 that islarger than a length L2 of the normal-size bus 316 (L1>L2). Theparasitic capacity and wiring resistance of the normal-size bus arelarger than those of the large-size bus. The semiconductor apparatus ofthe present embodiment is configured such that the condition L1>L2 ismet, and, in the present embodiment, the electrostatic current is morelikely to flow through the ESD device 312 than the internal circuit 311.Hence, the semiconductor apparatus of the present embodiment iseffective in preventing the electrostatic breakdown of the internalcircuit 311.

FIG. 41 shows another variation of the semiconductor apparatus of thepresent embodiment. In FIG. 41, the elements that are essentially thesame as corresponding elements in FIG. 38 are designated by the samereference numerals, and a description thereof will be omitted.

In the embodiment shown in FIG. 41, a resistor R1 is provided to connectthe internal circuit 311 with the large-size bus 313 via the contact314, and a normal-size bus 316 is provided to connect the ESD device 312with the large-size bus 313 via the contact 314. In the presentembodiment, because of the use of the resistor R1, the electrostaticcurrent is more likely to flow through the ESD device 312 than theinternal circuit 311. Hence, the semiconductor apparatus of the presentembodiment is effective in preventing the electrostatic breakdown of theinternal circuit 311.

FIG. 42 shows an overall configuration of the semiconductor apparatus ofthe present embodiment.

As shown in FIG. 42, the semiconductor apparatus of the presentembodiment includes a semiconductor chip 340, and the chip 340 includesI/O devices 341 in the central positions of the chip 340. The I/Odevices 341 receive and transmit various signals including an addresssignal, a command signal, a data signal and a clock signal. A pluralityof ESD devices 344 are disposed at peripheral positions of the chip 340.A large-size bus 342 is provided to interconnect the I/D devices 341 andthe ESD devices 344. External terminals 343 are provided on therespective signal lines of the large-size bus 342 to connect thesemiconductor apparatus with an external device. Each of the externalterminals 343 in FIG. 42 corresponds to the electrode 330 in FIG. 39.The electrodes 330 may be constructed in the form of either the bumps orthe pads.

In the semiconductor apparatus of FIG. 42, one end of each signal lineof the large-size bus 342 is connected to one of the I/O devices 341 viathe contact 345, and the other end of each signal lines of thelarge-size bus 342 is connected to one of the ESD devices 344 via thecontact 346.

In the semiconductor apparatus of the present embodiment, the connectionof the large-size bus 342 enables the ESD devices 344 to be spaced apartfrom the I/O devices 341 and to effectively attain the protection of theI/O devices 341. Specifically, when the I/O devices 341 are disposed inthe central locations of the chip 340, the ESD devices 344 can bedisposed at the peripheral locations of the chip 340 that are spacedapart from the I/O devices 341. It is possible that the large-size bus342 in the present embodiment have a length larger than the permissiblemaximum length of the normal-size bus that is needed to attain theprotection of the internal circuit as in the conventional semiconductorapparatus.

FIG. 43 shows a configuration of a semiconductor memory apparatus. Asshown in FIG. 43, the semiconductor memory apparatus generally includesan external terminal 350, a data input unit 351, a data output unit 352,a memory cell array 353, a writing unit 354, a reading unit 355, awriting data bus 356 and a reading data bus 357.

When it is intended to increase the degree of integration of the memorycore including the memory cell array 353, the writing unit 354 and thereading unit 355, the writing unit 354 is disposed on one side of thememory cell array 353 and the reading unit 355 is disposed on the otherside of the memory cell array 353 as shown in FIG. 43. In such aconfiguration, the data input unit 351 and the data output unit 352,which share the external terminal 350, are disposed adjacent to eachother and in the vicinity of the external terminal 350. If a normal-sizebus, which is provided to connect the external terminal 350 with eitherof the data input unit 351 or the data output unit 352 and meet thedemand for the circuit layout, is excessively long, the wiringresistance and the parasitic capacity of the normal-size bus may cause adefective operation of the semiconductor memory apparatus.

However, when the layout condition that the data input unit 351 and thedata output unit 352 be disposed adjacent to each other is met, at leastone of the signal line length of the writing data bus 356 connecting thedata input unit 351 and the writing unit 354 and the signal line lengthof the reading data bus 357 connecting the reading unit 355 and the dataoutput unit 352 becomes excessively long. The area of the entire chip isincreased and the delay of the signal transmission occurs. In thesemiconductor memory apparatus shown in FIG. 43, the signal line lengthof the writing data bus 356 connecting the data input unit 351 and thewriting unit 354 becomes excessively long.

FIG. 44A and FIG. 44B show another preferred embodiment of thesemiconductor apparatus of the invention.

The semiconductor apparatus of the present embodiment is configured inorder to resolve the above problem of the semiconductor memory apparatusin FIG. 43. FIG. 44A shows a single-bit configuration of thesemiconductor apparatus of the present embodiment. FIG. 44B shows amultiple-bit configuration of the semiconductor apparatus of the presentembodiment. In FIG. 44A and FIG. 44B, the elements that are essentiallythe same as corresponding elements in FIG. 43 are designated by the samereference numerals, and a description thereof will be omitted.

In the single-bit semiconductor apparatus of FIG. 44A, the writing unit354 is disposed on one side of the memory cell array 353, and thereading unit 355 is disposed on the other side of the memory cell array353. The data input unit 351 is disposed adjacent to the writing unit354, and the data output unit 352 is disposed adjacent to the readingunit 355. A large-size bus 362 is provided so that it is electricallyconnected at one end to the data input unit 351 via the contact 363, andit is electrically connected at the other end to the data output unit352 via the contact 363. An external electrode 361, which is provided toconnect the semiconductor apparatus with an external device, is formedon the large-size bus 362 at the central position thereof. The externalelectrode 361 corresponds to the electrode 330 in FIG. 39. The externalelectrode 361 may be constructed in the form of the bump or the pad.

In the semiconductor apparatus of the present embodiment, the connectionof the large-size bus 362 enables the data input unit 351 and the dataoutput unit 352 to be spaced apart each other and to effectively preventthe problem of the conventional semiconductor memory apparatus, such asa defective operation due to the wiring resistance and the parasiticcapacity of the normal-size bus having too long signal lines. Even whenthe signal line length of the large-size bus 363 is large, thelarge-size bus 363 provides a small electrical resistance and a smallparasitic capacity. It is no longer necessary to dispose the data inputunit 351 and the data output unit 352 in the vicinity of the externalterminal 361.

In the present embodiment, both the signal line length of the writingdata bus 364 connecting the data input unit 351 and the writing unit 354and the signal line length of the reading data bus 365 connecting thereading unit 355 and the data output unit 352 can be shortened.

In the multiple-bit semiconductor apparatus of FIG. 44B, the data inputunit 351A is disposed adjacent to the writing unit 354, and the dataoutput unit 352A is disposed adjacent to the reading unit 355, similarto the previous embodiment of FIG. 44A. A plurality of large-size buses362 are provided in parallel so that each large-size bus 362 iselectrically connected at one end to the data input unit 351A via thecontact 363, and each large-size bus 362 is electrically connected atthe other end to the data output unit 352A via the contact 363.

The present invention is not limited to the above-described embodiments,and variations and modifications may be made without departing from thescope of the present invention.

Further, the present invention is based on Japanese priority applicationNo. 2000-363901, filed on Nov. 29, 2000, Japanese priority applicationNo. 2000-363902, filed on Nov. 29, 2000, and Japanese priorityapplication No. 2000-363903, filed on Nov. 29, 2000, the entire contentsof which are hereby incorporated by reference.

1. A semiconductor apparatus having circuit components, comprising: afirst bus interconnecting the circuit components; a second businterconnecting the circuit components; and a switching unit outputtinga select signal that causes each circuit component to select one of thefirst bus and the second bus when transmitting a signal from one of thecircuit components to another, the second bus having a size larger thana size of the first bus, wherein the first bus is provided fortransmission of the signal between the circuit components beforeformation of the second bus, and, when the semiconductor apparatusoperates before the formation of the second bus, the signal istransmitted on the first bus from one of the circuit components toanother.
 2. A semiconductor apparatus having circuit components,comprising: a first bus interconnecting the circuit components; a secondbus interconnecting the circuit components; and a switching unitoutputting a select signal that causes each circuit component to selectone of the first bus and the second bus when transmitting a signal fromone of the circuit components to another, the switching unit beingconfigured such that the first bus is selected only when a wafer test isconducted before formation of the second bus, and the second bus isselected at any time the semiconductor apparatus operates after thewafer test is conducted.
 3. The semiconductor apparatus according toclaim 1, wherein the first bus and the second bus are provided totransmit a same signal from one of the circuit components to another. 4.The semiconductor apparatus according to claim 1, wherein the first busand the second bus are provided to transmit at least one of an addresssignal, a data signal, a control signal and a clock signal between thecircuit components.
 5. A semiconductor apparatus having circuitcomponents, comprising: a first bus interconnecting the circuitcomponents; a second bus interconnecting the circuit components; and aswitching unit outputting a select signal that causes each circuitcomponent to select one of the first bus and the second bus whentransmitting a signal from one of the circuit components to another, thesecond bus having a size larger than a size of the first bus, whereinthe switching unit is configured such that the second bus is alwaysselected when the semiconductor apparatus operates after the formationof the second bus in the semiconductor apparatus.
 6. The semiconductorapparatus according to claim 1, wherein the switching unit is providedto establish electrical connection between the circuit components byonly the selected one of the first bus and the second bus.
 7. Thesemiconductor apparatus according to claim 1, wherein the switching unitis provided with a programmable device.
 8. The semiconductor apparatusaccording to claim 1, wherein the second bus includes signal lineportions having a substantially equal length.
 9. A semiconductorapparatus having circuit components, comprising: a first wiring layerprovided on a chip and including a number M of first electrodes, the Mfirst electrodes being connected to the circuit components via a firstbus; and a second wiring layer provided above the first wiring layer andincluding a number N of second electrodes, the N second electrodes beingconnected to the circuit components via a second bus, the second bushaving a size larger than a size of the first bus, wherein thesemiconductor apparatus is configured such that a clock signal isreceived at each of the first electrodes and the second electrodes andthe conditions M>N.box-solid.1 are met, wherein the circuit componentsincludes respective receiver units each of which is connected to one ofthe M first electrodes, and, when a select signal is set at a firstlevel, the clock signal received at each first electrode is transmittedthrough the first wiring layer to corresponding one of the circuitcomponents, and, when the select signal is set at a second level, theclock signal received at each second electrode is transmitted throughthe second wiring layer to corresponding one of the circuit components.